Title
Electrical characterization and reliability study of HEMTs on composite substrates under high electric fields
Abstract
The electrical characterization, in DC and pulsed regime, and reliability analysis of T-gate high electron mobility transistors built on SiCopSiC and SopSiC composite substrates under high electric fields are here presented. The impact of different gate–drain overhang lengths on the electrical behavior of SiCopSiC devices is also investigated. We will demonstrate that devices can be efficiently realized over the proposed composite substrates, and that performances and robustness are comparable to devices processed on SiC or sapphire. The sensitivity to ESD-like events is also reported, using emission microscope for the failure analysis investigation.
Year
DOI
Venue
2008
10.1016/j.microrel.2008.07.031
Microelectronics Reliability
Keywords
Field
DocType
electric field,failure analysis,reliability analysis,high electron mobility transistor
Gallium nitride,Electric field,Electrostatic discharge,Composite number,Electronic engineering,Engineering,Sapphire,Transistor,High-electron-mobility transistor,Electron mobility
Journal
Volume
Issue
ISSN
48
8
0026-2714
Citations 
PageRank 
References 
1
0.62
1
Authors
8
Name
Order
Citations
PageRank
A. Tazzoli1154.51
G. Meneghesso25222.83
F. Zanon341.44
F. Danesin431.47
E. Zanoni5137.01
P. Bove610.96
R. Langer7279.16
J. Thorpe810.62