Name
Title | ||
|---|---|---|
Towards realization of a high-fidelity simulation model for short-term horizon forecasting in wafer fabrication facilities |
Abstract | ||
|---|---|---|
Discrete Event Simulation (DES) has widely been used for mid and long term forecasting in wafer fabrication plants. But the use of DES for short term forecasting has been limited due to the perceived modelling and computation complexity as well as the non-steady state nature of today's wafer fab operations. In this paper, we discuss some important modelling issues associated with building an online simulation model. Key elements considered are actual process routes, process and throughput modelling as a function of equipment behavior, lot size, and available processing modules, process dedication at equipment level, equipment downs at mainframe level, estimated lot release strategy, send ahead wafers, dispatch rules, and setup. Typical application areas are proactive dedication management, preventive maintenance scheduling and WIP based sampling optimization. |
Year | DOI | Venue |
|---|---|---|
2010 | 10.1109/WSC.2010.5678952 | Winter Simulation Conference |
Keywords | Field | DocType |
important modelling issue,estimated lot release strategy,process dedication,actual process route,high-fidelity simulation model,wafer fabrication facility,long term forecasting,throughput modelling,lot size,equipment level,equipment down,equipment behavior,towards realization,short-term horizon forecasting,wip,predictive models,preventive maintenance,data models,production,computational modeling,semiconductor device modeling,simulation model,discrete event simulation,process modelling,steady state,throughput,computational complexity | Data modeling,Wafer-level packaging,Simulation,Scheduling (computing),Computer science,Process modeling,Wafer fabrication,Throughput,Preventive maintenance,Discrete event simulation | Conference |
ISSN | ISBN | Citations |
0891-7736 | 978-1-4244-9864-2 | 9 |
PageRank | References | Authors |
1.33 | 2 | 7 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Wolfgang Scholl | 1 | 62 | 8.06 |
| Daniel Noack | 2 | 27 | 3.76 |
| Oliver Rose | 3 | 17 | 10.43 |
| Boon Ping Gan | 4 | 329 | 34.25 |
| Ming Li Peh | 5 | 9 | 1.33 |
| Peter Lendermann | 6 | 219 | 25.96 |
| Patrick Preuss | 7 | 12 | 4.16 |