Title
Fast and Accurate Automatic Defect CLuster Extraction for Semiconductor Wafers
Abstract
Reduction in integrated circuit (IC) half technology, which will no longer be sustainable by traditional fault isolation and failure analysis techniques. There is an urgent need for diagnostic software tools with (which manifest as clusters) observed from manufacturing defects can be traced back to a specific process, equipment or technology, a novel data mining algorithm defects from test data logs. This algorithm and provides accurate detection of 99%.
Year
DOI
Venue
2010
10.1109/DELTA.2010.66
DELTA
Keywords
Field
DocType
urgent need,algorithm defect,novel data,traditional fault isolation,semiconductor wafers,test data log,failure analysis technique,diagnostic software tool,cluster extraction,accurate detection,integrated circuit,accurate automatic defect,specific process,data mining,algorithm design and analysis,failure analysis,clustering algorithms,fault isolation,segmentation,clusters,integrated circuits,approximation algorithms
Approximation algorithm,Algorithm design,Fault detection and isolation,Computer science,Electronic engineering,Software,Test data,Cluster analysis,Failure analysis,Integrated circuit
Conference
Citations 
PageRank 
References 
1
0.36
5
Authors
6
Name
Order
Citations
PageRank
Melanie Po-Leen Ooi17018.35
Chris Chan210.36
Wey Jean Tee310.36
Ye Chow Kuang47219.81
Lindsay Kleeman5185.08
Serge Demidenko6477.78