Name
Abstract | ||
|---|---|---|
Semiconductor manufacturing is a highly complex and asset intensive process. Solutions are needed to automate control of equipment and improve efficiency. We describe a symbiotic simulation control system which uses reactive what-if analysis to find a stable configuration of a wet bench tool set. This control system is based on a generic framework for symbiotic simulation. We show that symbiotic simulation can be used to make control decisions in near real-time. Furthermore, we show that our approach yields a notable performance improvement over common practise. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1007/978-3-540-69389-5_5 | ICCS (3) |
Keywords | Field | DocType |
common practise,approach yield,control system,generic framework,symbiotic simulation control,reactive what-if analysis,symbiotic simulation,control decision,semiconductor manufacturing,notable performance improvement,symbiotic simulation control system,asset intensive process,near real time | Computer science,Simulation,Semiconductor device fabrication,Control engineering,Control system,Distributed computing,Performance improvement | Conference |
Volume | ISSN | Citations |
5103 | 0302-9743 | 11 |
PageRank | References | Authors |
0.94 | 17 | 6 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Heiko Aydt | 1 | 143 | 15.89 |
| Stephen John Turner | 2 | 607 | 60.50 |
| Wentong Cai | 3 | 1928 | 197.81 |
| Malcolm Yoke Hean Low | 4 | 694 | 52.19 |
| Peter Lendermann | 5 | 219 | 25.96 |
| Boon Ping Gan | 6 | 329 | 34.25 |