Title
Application of various optical techniques for ESD defect localization
Abstract
Various optical defect localization techniques are applied on the same integrated circuits (IC). These circuits were previously stressed by Electro Static Discharges (ESD) to create defects. The results obtained by each technique were analyzed to determine the nature of the defects. The different data are compared to assess their sensitivity and to evaluate the contribution of each technique in a failure analysis flow.
Year
DOI
Venue
2006
10.1016/j.microrel.2006.07.021
Microelectronics Reliability
Keywords
Field
DocType
integrated circuit,failure analysis
Electrostatic discharge,Electronic engineering,Engineering,Electronic circuit,Integrated circuit
Journal
Volume
Issue
ISSN
46
9
0026-2714
Citations 
PageRank 
References 
1
0.44
3
Authors
10
Name
Order
Citations
PageRank
F. Essely141.95
F. Darracq263.34
V. Pouget35111.38
M. Remmach462.03
F. Beaudoin52010.73
N. Guitard643.07
M. Bafleur710.44
P. Perdu86027.38
A. Touboul932.03
D. Lewis10219.42