Title
In situ nanomanipulation with 3D SEM-CT observation inside environmental SEM
Abstract
In situ nanomanipulation system is presented with 3D scanning electron microscope - computed tomography (SEM-CT) system integrated with inside an environmental - SEM (E-SEM). The E-SEM was used to achieve a real-time high resolution imaging for high precision nanomanipulation. The SEM-CT system was used for obtaining 3D cross-sectional image with sub-micron high resolution. In this paper, Caenorhabditis elegans (C. elegans) was used as a target of biological sample to demonstrate a nanoinjection operation. The nanoinjection was determined by the SEM-CT system with its 3D information.
Year
DOI
Venue
2015
10.1109/MHS.2015.7438314
2015 International Symposium on Micro-NanoMechatronics and Human Science (MHS)
Keywords
Field
DocType
in situ nanomanipulation system,three-dimensional SEM-CT observation,environmental SEM,scanning electron microscope,computed tomography,high precision nanomanipulation,three-dimensional cross-sectional image,submicron high resolution,Caenorhabditis elegans,nanoinjection operation
Nanotechnology,Analytical chemistry,In situ,Scanning electron microscope,Computed tomography,Materials science,Environmental scanning electron microscope
Conference
Citations 
PageRank 
References 
0
0.34
1
Authors
5
Name
Order
Citations
PageRank
Masahiro Nakajima11516.33
Masaru Takeuchi2918.01
Toshio Fukuda32723818.58
Yasuhisa Hasegawa445694.62
Qiang Huang526691.95