Title
Charge pumping test technique using CMOS ring oscillator on leakage issue.
Abstract
With the scaling down of CMOS devices, traditional charge pumping measurement used to extract interface trap distribution is confronted with great challenge due to large leakage current. Special pulses with high frequency and short transition time are required to accurately extract the interface trap density, which places great demands on equipments in current charge pumping measurements. In this paper, a new charge pumping test technique is proposed, in which suitable voltage pulses are produced by CMOS ring oscillator instead of equipments. Simulation results show that frequency of the voltage pulses generated by ring oscillator can be readily greater than 1GHz, and rising/falling time is around 60ps. Due to these superiorities, new technique can measure interface trap density more exactly by totally eliminating the influence of gate leakage without any handling with the leakage current.
Year
DOI
Venue
2017
10.1016/j.mejo.2017.08.009
Microelectronics Journal
Keywords
Field
DocType
Charge pumping (CP),Tunneling current,EOT,MOSFET,Ring oscillator
Charge pumping,Ring oscillator,Leakage (electronics),Voltage,Electronic engineering,CMOS,Transition time,Engineering,MOSFET,Scaling
Journal
Volume
ISSN
Citations 
68
0026-2692
0
PageRank 
References 
Authors
0.34
0
6
Name
Order
Citations
PageRank
Yongbo Liu100.34
Zhengyong Zhu200.34
Huilong Zhu301.35
Guangxing Wan400.34
Junfeng Li591.28
C. Zhao652.11