Name
Abstract | ||
|---|---|---|
The paper investigates the effect of 5MeV alpha particle irradiation in RF MEMS capacitive switches with silicon nitride dielectric film. The investigation included MIM capacitors in order to obtain a better insight on the irradiation introduced defects in the dielectric film. The assessment employed the thermally stimulated depolarization currents method for MIM capacitors and the capacitance–voltage characteristic for MEMS switches. Asymmetric charging was monitored in MIM capacitors due different contact electrodes and injected charge interactions. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1016/j.microrel.2008.06.047 | Microelectronics Reliability |
Field | DocType | Volume |
Film capacitor,Capacitor,Microelectromechanical systems,Dielectric,Irradiation,Capacitive sensing,Electronic engineering,Engineering,Silicon nitride,Electrode | Journal | 48 |
Issue | ISSN | Citations |
8 | 0026-2714 | 1 |
PageRank | References | Authors |
0.47 | 3 | 8 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| J. Ruan | 1 | 1 | 0.47 |
| E. Papandreou | 2 | 14 | 5.74 |
| M. Lamhamdi | 3 | 28 | 11.09 |
| M. Koutsoureli | 4 | 21 | 7.67 |
| F. Coccetti | 5 | 40 | 11.42 |
| P. Pons | 6 | 49 | 18.02 |
| G. Papaioannou | 7 | 35 | 8.62 |
| R. Plana | 8 | 1 | 0.47 |