Name
Title | ||
|---|---|---|
Charging-Effects in RF capacitive switches influence of insulating layers composition |
Abstract | ||
|---|---|---|
The dielectric charging is one of the major failures reducing the reliability of capacitive switches with electrostatic actuation. Then the control of the charging/discharging processes is a key factor to allow a fast recovering of the dielectric after charging. From transient current measurements on MIM capacitors it is possible to select the best material for RF-MEMS. |
Year | DOI | Venue |
|---|---|---|
2006 | 10.1016/j.microrel.2006.07.046 | Microelectronics Reliability |
Keywords | Field | DocType |
kinetics,infrared | Hydrogen,Plasma-enhanced chemical vapor deposition,Capacitor,Dielectric,Electronic engineering,Capacitive sensing,Engineering,Thermal conduction,Chemical bond,Silicon nitride | Journal |
Volume | Issue | ISSN |
46 | 9 | 0026-2714 |
Citations | PageRank | References |
5 | 3.85 | 0 |
Authors | ||
7 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| M. Lamhamdi | 1 | 28 | 11.09 |
| J. Guastavino | 2 | 17 | 6.55 |
| L. Boudou | 3 | 17 | 6.55 |
| Y. Segui | 4 | 17 | 6.55 |
| P. Pons | 5 | 49 | 18.02 |
| L. Bouscayrol | 6 | 5 | 3.85 |
| R. Plana | 7 | 5 | 3.85 |